| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample preparation method and a sample preparation device capable of discriminating clearly a boundary of a layer including an organic insulating film. Ž<P>SOLUTION: The method has a cross section exposing process for exposing a cross section of a sample by irradiating the sample Wa, formed by laminating the organic insulating film and another insulating film, with a focused ion beam 20A; and a cross section treating process for treating so that each film on the cross section can be discriminated by irradiating with the focused ion beam, while supplying water or steam to the cross section. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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