| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid flow blowout apparatus (blowout nozzle 23) which can improve a reaching level of components such as concentration, temperature and humidity of a fluid to be blown out by suppressing diffusion due to friction with ambient air. Ž<P>SOLUTION: The fluid flow blowout apparatus includes a substantially cylindrical periphery tube part 10 forming a cleaning gas path, a substantially columnar annular flow generation column 11 provided coaxially with the periphery tube part 10 in the center portion of the periphery tube part 10 for annularly shaping a cleaning gas flow to be blown out, and a substantially cylindrical flow diverting tube 12 provided between the periphery tube part 10 and the annular flow generation column 11 and coaxially with the periphery tube part 10 and the annular flow generation column 11. The apparatus is configured so that an area ratio of an inlet side to an outlet side of a cleaning gas is in the relation of Ai/Ao>Bi/Bo, when assuming an inlet side passage area of a main annular fluid passage A formed between the annular flow generation column 11 and the flow diverting tube 12 as Ai, an outlet side passage area thereof as Ao, an inlet side passage area of a sub-annular fluid passage B formed between the periphery tube part 10 and the flow diverting tube 12 as Bi, and an outlet side passage area thereof as Bo. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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