| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-profile absolute encoder. SOLUTION: A silicon sensor substrate 4 is provided to face a scale disc 1 having an absolute pattern 100 and an incremental pattern 101 formed thereon. The silicon sensor substrate 4 includes: an LED 401 for irradiating the absolute pattern 100 and the incremental pattern 101 with scattered light; and light-sensitive element arrays 403 and 404 for detecting the scattered light reflected by the absolute pattern 100 and the incremental pattern 101. The LED 401 is provided in a recess 602 formed between the light-sensitive element arrays 403 and 404, and has the emission surface of the LED 401 set in flush with the acceptance surfaces of the light-sensitive element arrays 403 and 404. COPYRIGHT: (C)2010,JPO&INPIT
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