| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a display device having a structure wherein an Al-based thin film and an electric conductive film are directly connected with each other and the contact resistance between the Al-based thin film and the electric conductive film can be stably reduced. Ž<P>SOLUTION: The method for manufacturing a display apparatus has a structure wherein a thin film composed of pure aluminum or aluminum alloy (hereinafter referred to as "Al-based thin film") and an electric conductive film are in direct connection with each other on an substrate. Further, the method includes: a step for forming the Al-based thin film; a step for forming an insulating film on the Al-based thin film; a step for forming a contact hole on the insulating film; a step for forming the electric conductive film; and a step for creating, after the step for forming the contact hole and before the step for forming the electric conductive film or in the step for forming the electric conductive film, cracks on a natural oxide film on the Al-based thin film by rapidly heating and/or rapidly cooling the Al-based thin film. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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