| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump in which electrodes are reliably prevented from peeling off, a sufficiently stable operation can be effected in high speed drive, and variation in displacement can be adequately suppressed. SOLUTION: The piezoelectric pump includes: a structure provided with at least two pieces of piezoelectric elements arranged in the direction of fluid flow, and one support member supporting the piezoelectric elements; first and second bases sandwiching the structure; a space part surrounded by the first base and the structure; and first and second openings which each communicate with pumping chambers formed of the second base and the structure. COPYRIGHT: (C)2010,JPO&INPIT |
