| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma reactor having improved showerhead gas injection technology. <P>SOLUTION: The RF plasma reactor 30 has a reactor container, an electrode pair inside the above consisting of metal surfaces arranged facing to each other with a spacing and defining a plasma discharge chamber 36 in between. At least one of the metal surfaces is a plate 40 of the metal surface with a number of gas feed openings 44 through it, the gas feed openings 44 headed toward the plasma discharge chamber 36 from a distribution chamber extending along the plate 40 facing to that 36 through the metal surface. With this, the distribution chamber includes a gas injection structure 48 having a back-wall 31 facing and separated from the plate 40, and equipped with a number of gas injection openings 50, and is distributed along the back-wall 31 and connected to at least one gas feed line to the reactor. <P>COPYRIGHT: (C)2010,JPO&INPIT |
