摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning probe microscope enabling the characteristics of a sample to be measured/observed in a liquid without placing a probe in the liquid. Ž<P>SOLUTION: The scanning probe microscope includes a cantilever 2 having a probe 2a on the tip and the probe 2a disposed closely to the surface of a sample 6, a scanning means 4 for relatively scanning the sample 6 and the probe 2a in X and Y directions, and a Z-driving means for relatively changing the distance between the sample 6 and the probe 2a. The microscope is configured so that a thin film may be disposed between the cantilever 2 and the sample 6 to obtain the mechanical, electrical, optical or magnetic characteristics of the sample 6 through the thin film. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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