发明名称 OBSERVATION APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 A disclosed observation apparatus for observing a void generated in an underfill resin upon mounting a body to be mounted on a substrate via the underfill resin in flip-chip mounting includes: a mounting unit mounting the body to be mounted on the substrate; and an observation unit observing behavior of the underfill resin while the mounting unit is mounting the body to be mounted on the substrate.
申请公布号 KR100949130(B1) 申请公布日期 2010.03.25
申请号 KR20070122721 申请日期 2007.11.29
申请人 发明人
分类号 G01B11/00;H01L21/60;H01L21/66 主分类号 G01B11/00
代理机构 代理人
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