| 摘要 |
PURPOSE: A manufacturing method of boron trifluoride gas is provided to safely and simply manufacture the boron trifluoride gas by using an indirect or a direct heating method, and to reduce the number of manufacturing costs and danger for processing. CONSTITUTION: A manufacturing method of boron trifluoride gas comprises the following steps: heating raw material compound selected from LiBF4, KBF4, NaBF4, and HBF4; thermally decomposing the raw material; and separating the decomposed raw material. The raw material is NaBF4 or KBF4. A heating process of the raw material is performed in 1000-3500°C. A heating process is used with an electric furnace, gas flame or plasma.
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