| 摘要 |
Provided is a process for readily and efficiently producing monosilane which is industrially significantly useful. The process uses a monosilane production apparatus comprising a reaction column, a plurality of upper condensers each of which has a reflux feed pipe serially connected to a top portion of the reaction column, a bottom reboiler of the reaction column, and an evaporation tank connected to a bottom portion of the reaction column; and the process comprises supplying at least one of trichlorosilane and dichlorosilane to a middle stage of the reaction column, supplying at least one of a tertiary aliphatic hydrocarbon-substituted amine and a tertiary aliphatic hydrocarbon-substituted amine hydrochloride as a catalyst to an upper stage of the reaction column, introducing a resultant mixture containing monosilane, monochlorosilane, dichlorosilane, and trichlorosilane from the top portion of the reaction column to the plurality of upper condensers, separating monosilane from condensates containing monochlorosilane, dichlorosilane, and trichlorosilane at a temperature of from 50 to −50° C. in the upper condensers, recycling the condensates after separating monosilane, through the reflux feed pipes to the upper stage of the reaction column, bringing the condensates into contact with the catalyst in the reaction column, withdrawing a bottom recovery liquid containing tetrachlorosilane and the catalyst from the bottom portion of the reaction column, introducing the bottom recovery liquid into the evaporation tank, and recycling the catalyst recovered from the bottom portion of the evaporation tank, to the reaction column.
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