| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To appropriately control vehicle dispatch positions in a transfer system capable of controlling dispatch positions of vehicles or others for transferring objects, such as various substrates used in semiconductor device manufacture. <P>SOLUTION: The transfer system (100) includes a plurality of vehicles (3), a set setting means (11, 12) for calculating the difference of the number of a plurality of vehicles present in each of a plurality of sets from the number of a plurality of vehicles scheduled to transfer objects in each of the plurality of sets, and setting a target overoccupied set with a relatively large difference calculated and a target underoccupied set with a relatively small difference, and a control means (14) for moving a plurality of vehicles from the set target overoccupied set to an intermediate set that is a set interconnecting the target overoccupied set and the set target underoccupied set and having a calculated difference smaller than that of the target overoccupied set and larger than that of the target underoccupied set, and next from the intermediate set to the target overoccupied set. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
