| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus for efficiently performing laser beam machining correspondingly to a meandering machining position of a workpiece. <P>SOLUTION: This invention relates to the laser beam machining apparatus including a chuck table 36 for holding the workpiece W, a laser beam irradiation means having a condenser 53 equipped with a condensing lens 534, a feeding-of-work means for moving the chuck table in the X axis direction, and an indexing-feeding means for moving it in the Y axis direction. The laser beam machining apparatus is provided with: a condenser moving actuator 7 for moving the condenser in the Y axis direction; a condenser moving position detector for detecting the moving position in the Y axis direction; a machining position displacement detector which is arranged forward in the machining direction of the condenser and provided with a microscope and a position detecting sensor, wherein the microscope is for detecting displacement of a workpiece in the Y axis direction in the machining position in front of the machining direction from the optical axis of the laser beam; and a controller for controlling the condenser moving actuator on the basis of a detection signal from the machining position displacement detector and the condenser moving position detector. <P>COPYRIGHT: (C)2010,JPO&INPIT |
