| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for preventing leak current produced between two electrodes of a semiconductor Mach-Zehnder type optical circuit. SOLUTION: The semiconductor Mach-Zehnder type optical circuit includes an optical circuit formed of two branch parts for branching an optical waveguide in two directions and first and second arm parts connected between the branched optical waveguides. In the semiconductor Mach-Zehnder type optical circuit for forming to laminate a first clad layer comprising a first conductive semiconductor, a well layer formed on the first clad layer, and a second clad layer formed on the well layer and comprising a second conductive semiconductor of a reverse type of the first conductive type, and forming first and second electrodes electrically connecting the optical waveguide to the second clad layer of the first and second arm parts, a third clad layer comprising the first conductive semiconductor is formed on at least a part except for just under the electrodes of the second clad layer of each leading to the second electrode from the first electrode formed of the first and second arm parts of the region of both the sides of the first and second electrodes and the branch parts connecting both their ends respectively. COPYRIGHT: (C)2010,JPO&INPIT |
