| 摘要 |
PURPOSE: A film forming device, a film forming method, and a computer readable memory medium are provided to properly deposit a molecular layer by reducing the mixture of a raw gas. CONSTITUTION: A film forming device(10) includes a plurality of first planar units and second planar units. The first planar unit is installed inside a cylindrical container and has an opening. The second planar unit reciprocates inside the opening. A first gas flows through a first path. A second gas flows through a second path. The substrate is maintained between a pair of the second planar units.
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