| 摘要 |
PROBLEM TO BE SOLVED: To obtain a defect inspecting apparatus suppressing adhesion of foreign substances to a substrate to be inspected, and cooling an optical system, without upsizing the apparatus. SOLUTION: A fan filter unit 16b is disposed at the upper part of an inspection part frame 15, and the optical system 40 and a stage 300 are arranged on a vibration-free base 20. Clean air flows from an air-flow 29c to an air-flow 29e through an air-flow 29d. A cooling effect on the optical system 40 is caused by a flow of the clean air flowing along the side wall 40a of an optical system frame 408. Since the inner wall of the inspection part frame 15 for accommodating the optical system 40, the side wall 40a and the bottom plane of the optical system frame 408, and the upper plane of the vibration-free base 20, are used as a clean air channel for preventing the foreign substances from adhering to the substrate to be inspected 1, the clean air channel is formed without independently disposing any clean air channel-use member (partition plate etc.), and without independently disposing any optical system 40 cooling means, thereby suppressing the adhesion of the foreign substances to the substrate, and cooling the optical system. COPYRIGHT: (C)2010,JPO&INPIT
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