| 摘要 |
PROBLEM TO BE SOLVED: To provide a back pressure keeping apparatus capable of highly precisely adjusting a pressure by utilizing a gas pressure, decreasing the cost of the apparatus, suppressing the influence of pressure fluctuation generated by the change in temperature, and achieving a more stable keeping of the pressure, and to provide a back pressure keeping method and a liquid droplet delivering apparatus using the method. SOLUTION: The back pressure keeping apparatus includes: a back pressure forming member 41 having an internal space communicated with the inside of a liquid holding part 3, filled with a gas and having one face composed of a flexible film; a pressure detecting means 43 for detecting the pressure of the internal space of the back pressure forming member 41; a leak flow path 422 for communicating the internal space with a gas region of the outside under an atmospheric pressure; an on-off valve 44 for opening and closing the leak flow path 422; and an energizing means for acting a force toward the outside to the flexible film and making the inside of a delivery opening of a liquid droplet delivering head 2 to a predetermined back pressure condition smaller than the atmospheric pressure. The opening and closing of the on-off valve 44 is controlled based on a value detected by the pressure detecting means 43, and the pressure of the internal space is controlled to the predetermined back pressure condition. COPYRIGHT: (C)2010,JPO&INPIT |
