Measuring apparatus

摘要

A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.