| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve operability and design and to prevent erroneous actuation of a displacement sensor caused by abrasion powder generated during drive of an ultrasonic electric motor. <P>SOLUTION: The ultrasonic electric stage includes a base 1, a Y table 2, an X table 3, a linear type ultrasonic motor 6 for driving the Y table 2, an optical linear sensor 7 for detecting an amount of movement of the Y table 2, a linear type ultrasonic motor 4 for driving the X table 3, and an optical linear sensor 5 for detecting an amount of movement of the X table 3. The linear type ultrasonic motor 6, optical linear sensor 7, linear type ultrasonic motor 4, and optical linear sensor 5 are disposed in a position other than the front surface of the ultrasonic electric stage so as not to extend beyond the upper surface of the X table 3 and in a position where wear powder generated during drive of linear type ultrasonic motors 6 and/or 4 does not adversely affect the optical linear sensors 7 and 5. <P>COPYRIGHT: (C)2010,JPO&INPIT |
