发明名称 LOW-TEMPERATURE MEASURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To eliminate a possibility for adversely affecting to the correctness of measurement results, by eliminating dew condensation phenomena, and eliminating use of electric holding device, in a hydraulic adjusting and holding device. Ž<P>SOLUTION: The low temperature measurement device 100 includes: a housing 10; a holding base 60 for holding a measurement element 62 provided in the housing 10; a flat table 50 provided in the housing 10; and at least one hydraulic adjusting and holding device 30 arranged on the flat table 50. The housing 10 which is a hermetically sealed housing of the specified measurement chamber 12, the upper lid of which is including a transparent member. The hydraulic adjusting and holding device 30 is composed so that it is holding at least one probe 42. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010060555(A) 申请公布日期 2010.03.18
申请号 JP20090095601 申请日期 2009.04.10
申请人 STAR TECHNOLOGIES INC 发明人 LOU CHOON LEONG
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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