UNIT FOR SPRAYING AIR AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING THE UNIT

摘要

PURPOSE: An air spraying unit and an apparatus for processing a substrate including the same are provided to maintain the substrate dry efficiency of the air spraying unit by forming a support block to support the spray nozzle of an air knife and the both end of the air knife. CONSTITUTION: An air spraying unit includes an air knife(110), a support unit(120) and adjusting units(130,140). The air knife includes a spraying nozzle(112) to spray an air to a substrate and is expanded to the direction which is parallel to the substrate. The support unit supports the both end of the air knife. The air knife is rotated by the support unit. The adjusting units including a first adjusting unit and a second adjusting unit adjust the spray direction of the air.