| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface plasma generation device for stably generating high-speed surface plasma by properly setting the rising speed of voltage to be applied between electrodes. <P>SOLUTION: The surface plasma generation device includes the surface side electrode and the back side electrode with an insulting material therebetween, wherein a voltage is applied between both electrodes to generate surface plasma. The rising speed of the voltage to be applied between the electrodes is 3-7 μs/kV, preferably 4-5 μs/kV. Preferably, this applied voltage is pulsed to set the rising speed of the applied voltage to be a predetermined value. It can be triangle-waveformed to rise at the predetermined value. At this point, the waveform lowering on the negative side can be set to be smaller. Additionally, when the surface side electrode is doughnut-shaped, surface plasma jet rises vertically from the surface, and so the rising speed of the applied voltage is easily and properly set. <P>COPYRIGHT: (C)2010,JPO&INPIT |
