| 摘要 |
PROBLEM TO BE SOLVED: To curtail a time required for draining an object coated with a coating liquid with regard to a coating device in which the object is immersed in the coating liquid in a coating tank to be coated. SOLUTION: The coating liquid is supplied into a liquid storage chamber 17 in which a semiconductor device 5 to be coated is held to immerse the semiconductor device 5 in the coating liquid. Then, after the coating liquid is drawn out from the liquid storage chamber 17, air is ejected from an air feeding path 37, and the excess coating liquid adherent to the semiconductor device 5 and the coating liquid adherent to the inner surface of the liquid storage chamber 17 are discharged by the air, which is sucked from a multifunctional hole 22 by a suction device 31 and ejected through the air feeding path 37 and outside air sucked from a vent hole 32. COPYRIGHT: (C)2010,JPO&INPIT
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