OBJECT DETECTING DEVICE AND OBJECT DISPLACEMENT DETECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To certainly detect the existence of a semiconductor substrate without requiring a reflecting plate with a special structure. SOLUTION: The difference is detected between the position of the reflection point (Ra) obtained from the reflected light (6a) when irradiated light (6) is reflected on the reflecting plate (5) and the position of the reflection point (Rc) obtained from the reflected light (6c) when irradiated light (6) is reflected on a semiconductor substrate (S), and the existence of the semiconductor substrate (S) is determined. Since a special reflecting plate is not required, the cost does not increase and the detection can be easily performed. COPYRIGHT: (C)2010,JPO&INPIT