| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vibrating piece whose irregularity in CI values between vibrating pieces can be stabilized even if a base is made shorter while the overall size of the vibrating piece can be miniaturized, to provide a vibrator having the vibrating pieces, and to provide an oscillator and an electronic apparatus including the vibrator. <P>SOLUTION: The present invention relates to a vibrating piece comprising a base 110 and vibrating arms formed protruding from the base 110. Notches 125 are formed in the base 110, grooves 123, 124 are formed on front faces or rear faces of the vibrating arms, and the width of the vibrating arms, namely, the short side of the vibrating arms is 50μm or larger and 150μm or shorter. The depth of at least one of the grooves on the front face and the rear face is 30% or larger and smaller than 50% of the thickness of the vibrating arms, namely, the total length in the depthwise direction of the vibrating arms. The width of at least one of the grooves at the front face and the rear face, namely, short sides of openings of the grooves are 40% or larger and smaller than 100% of widths of the vibrating arms. The CI value of the vibrating piece is 100 KΩor smaller. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
