| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device of a cylindrical body for easily and accurately obtaining displacement of the cylindrical body. SOLUTION: There is provided the surface inspection device for rotating and inspecting the surface state of the cylindrical body W. This device includes an illumination light source 1 for illuminating the cylindrical body W, and two side cameras 2 and 2 disposed in positions symmetric to each other with an axis line X1 of illumination from the light source 1 used as an axis of symmetry and detecting light reflected from the surface of the illuminated cylindrical body W. Of the surface of the cylindrical body W, when taking positions as luminance peak positions P1 and P2 where reflected light of the highest luminance is detected by the side cameras 2 and 2, detection positions of the side cameras on the surface of the cylindrical body W are set at luminance peak deviation positions P2 and P2 to which displacements are made by an equal distance circumferentially in opposite directions from the corresponding peak positions P1 and P1. COPYRIGHT: (C)2010,JPO&INPIT
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