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发明名称
Verfahren zum Erzeugen einer Siliciumcarbidschicht
摘要
申请公布号
DE1471421(A1)
申请公布日期
1969.01.02
申请号
DE19631471421
申请日期
1963.06.14
申请人
SIEMENS AG
发明人
THEODOR RUMMEL,DR.-ING.
分类号
C04B41/50;C04B41/87;C30B15/10
主分类号
C04B41/50
代理机构
代理人
主权项
地址
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