发明名称 FinFET device with multiple fin structures
摘要 A semiconductor device includes a group of fin structures. The group of fin structures includes a conductive material and is formed by growing the conductive material in an opening of an oxide layer. The semiconductor device further includes a source region formed at one end of the group of fin structures, a drain region formed at an opposite end of the group of fin structures, and at least one gate.
申请公布号 US7679134(B1) 申请公布日期 2010.03.16
申请号 US20040754515 申请日期 2004.01.12
申请人 GLOBALFOUNDRIES 发明人 BUYNOSKI MATTHEW S.;AN JUDY XILIN;WANG HAIHONG;YU BIN
分类号 H01L29/94;H01L21/308;H01L21/3213;H01L21/336;H01L29/786 主分类号 H01L29/94
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