NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要
<p>PURPOSE: A non-volatile memory device and a method for fabricating the same are provided to prevent depletion layer from being formed in memory cell operation by reducing the impurity doping concentration of a floating gate. CONSTITUTION: A non-volatile memory device comprises a cell region and a peripheral circuit region. A floating gate electrode of a cell region has an impurity doping concentration lower than the floating gate electrode of a peripheral circuit region. An inversion layer is formed in the interface of the tunnel insulation film(310) and floating gate electrode(320).</p>
申请公布号
KR20100028825(A)
申请公布日期
2010.03.15
申请号
KR20080087740
申请日期
2008.09.05
申请人
HYNIX SEMICONDUCTOR INC.
发明人
CHO, HEUNG JAE;JOO, MOON SIG;KU, JA CHUN;KIM, YONG SOO;CHOI, WON JOON