| 摘要 |
<p>PURPOSE: An electrostatic chuck electricity balanced circuit repair is provided so that the electrical connection between a bipolar electrode included within an electrostatic chuck and a conductivity mask arranged after removal of an electrostatic chuck in normality of the electrostatic chuck can be tested and it can repair. CONSTITUTION: A substrate support assembly comprises an electrostatic chuck(105), a conductive liner(103), a conductivity piping(132), and a conductive insert. The electrostatic chuck has an opening which is penetrated and arranged while having the electrode buried to inside. A conductive liner is arranged in the surface of the electrostatic chuck within opening. It extends from the bottom surface of the electrostatic chuck and the conductivity piping is arranged to opening and axial direction. The conductive insert is at least partly and at least partly inserted within opening within the conductivity piping.</p> |
