METHOD FOR MANUFACTURING THIN FILM TRANISISTOR AND DISPLAY DEVICE

摘要

PURPOSE: A manufacturing method of a thin film transistor and a manufacturing method of a display device can produce small off current. In that way the thin film transistor in which S value smalls and the switching characteristic is good can be manufactured. CONSTITUTION: A manufacturing method of the thin film transistor comprises a step forming the back channel portion(102) in the thin film transistor etching is done by using resist mask, a step of removing resist mask the drug solution containing the hydrophilic group including the sulfur is used. The concentration of the sulfur existing in the back channel portion includes the step that the LLD this by the secondary ion mass spectroscopy it etches the superficial part it becomes.