| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an infrared sensor device capable of detecting the degree of vacuum in a package while suppressing the complication of the configuration. Ž<P>SOLUTION: The infrared sensor device includes a diode 31 having an electric characteristic depending on the ambient vacuum and for detecting the radiation energy intensity of a far infrared light, a package for holding the diode 31 and a detection circuit 36 capable of detecting the degree of vacuum inside of the package by detecting at least a part of the electric characteristic of the diode 31. Thereby, the degree of vacuum inside the package can be detected without complicating the configuration such as separately setting up the composition for detecting the degree of vacuum. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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