| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow controller detecting a failure and performing self-diagnosis when a failure occurs in a gas flow rate measurement part while reducing a system in size without installing an additional gas flow meter. <P>SOLUTION: The flow controller has: a main pipe 10 supplying a fluid; a sensor pipe 20 connected to the main pipe 10 in parallel; a first flow rate measurement means 30 and a second flow rate measurement means 40 independently measuring a flow rate of the fluid flowing through the sensor pipe 20; a comparison circuit 50 comparing both measurement results of the first flow rate measurement means 40 and the second flow rate measurement means 40, and deciding whether the measurement results are the same or not; and a control means 60 maintaining a flow control state when the measurement results are the same, and outputting a flow rate alarm signal when both the measurement results are not the same. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
