| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the strength of a fixed electrode board which is arranged in the outer side of movable electrode boards and fixed electrode boards that consist of a capacitor, and increase the impact resistance and breakage-proof nature of a capacitive sensor. Ž<P>SOLUTION: A cavity part 36, such as a penetration hole, is formed on a silicon board 32, and a vibration electrode board 34 is arranged on the surface of the silicon board 32 so as to cover the top of the cavity part 36. The fixed electrode board 35 covers the top of the vibration electrode board 34, while keeping a minute gap between the vibration electrode board 34 and it, and the peripheral part is fixed on the surface of the silicon board 32. The external surface of the wall of the fixed electrode board 35 is covered with a reinforcing film 44, which consists of metals, such as Au, Cr and Pt. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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