发明名称 FINE STRUCTURE TRANSFER MOLD AND FINE STRUCTURE TRANSFER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a fine structure transfer mold allowing a fine structure transfer device to hold by a sufficient holding force so that sizes of available transfer objects may not be limited, and excellent in durability. SOLUTION: A fine structure transfer mold 1a has a pattern section 2a with fine irregularity formed on its surface, a stationary section 3a formed outside the pattern section 2a and a slant section 4a prepared between the pattern section 2a and the stationary section 3a so that the pattern section 2a may be protruded more than the stationary section 3a. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010052288(A) 申请公布日期 2010.03.11
申请号 JP20080219972 申请日期 2008.08.28
申请人 HITACHI INDUSTRIAL EQUIPMENT SYSTEMS CO LTD 发明人 OGINO MASAHIKO;HASEGAWA MITSURU;MIYAUCHI AKIHIRO;SUKAI KAZUNARI;SHIMAO DAISUKE
分类号 B29C59/02;B29K79/00;H01L21/027 主分类号 B29C59/02
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