发明名称 HOUSING FOR MICRO-MECHANICAL AND MICRO-OPTICAL COMPONENTS USED IN MOBILE APPLICATIONS
摘要 The present invention relates to a housing for one or more micromechanical and/or micro-optic components, wherein the housing exhibits a supporting substrate having at least one micromechanical and/or micro-optic component and at least one cap substrate, which is joined to the supporting substrate. The supporting substrate and the at least one cap substrate form at least one cavity, which at least partially encloses the at least one micromechanical and/or micro-optic component, wherein the side of at least one cap substrate facing the at least one micromechanical and/or micro-optic component exhibits at least one optical window and at least one mechanical stop. Furthermore, the object of the present invention is a method for producing such a housing, wherein the method is particularly usable for encapsulation at the wafer level.
申请公布号 US2010061073(A1) 申请公布日期 2010.03.11
申请号 US20080448911 申请日期 2008.01.17
申请人 OLDSEN MARTEN;HOFMANN ULRICH 发明人 OLDSEN MARTEN;HOFMANN ULRICH
分类号 H05K7/04;B21D39/03 主分类号 H05K7/04
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