发明名称 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING ETCHING TO ETCH STOP REGIONS
摘要 A method of manufacturing a semiconductor device. The method includes providing a wafer having a first face and a second face opposite the first face, selectively doping the wafer via the first face to selectively form etch stop regions in the wafer and etching the wafer at the second face to the etch stop regions.
申请公布号 US2010059864(A1) 申请公布日期 2010.03.11
申请号 US20080207196 申请日期 2008.09.09
申请人 INFINEON TECHNOLOGIES AG 发明人 MAHLER JOACHIM;FUERGUT EDWARD;KROENINGER WERNER
分类号 H01L23/58;H01L21/304 主分类号 H01L23/58
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