| 摘要 |
Provided are a plasma temperature control apparatus and a plasma temperature control method, wherein plasma at a room temperature or below, especially below zero, can be generated and plasma temperature can be more accurately controlled in a wide temperature range from a low temperature to a high temperature. The plasma temperature control apparatus is provided with a plasma-generating section (40) which brings plasma-generating gas into the plasma state, and a plasma-generating gas temperature control section (30) which controls the temperature of the plasma-generating gas to be supplied to the plasma-generating section (40). The plasma temperature control apparatus controls the temperature of plasma generated by the plasma-generating section (40) by controlling the temperature of the plasma-generating gas. |
