发明名称 METHOD AND DEVICE FOR EVALUATING POSITIONAL UNEVENNESS OF IRRADIANCE OF SOLAR SIMULATOR
摘要 PROBLEM TO BE SOLVED: To provide a method and device for evaluating positional unevenness of irradiance of a solar simulator in which positional unevenness of irradiance can be evaluated efficiently in a short time at low cost. SOLUTION: The method of evaluating positional unevenness of irradiance of a solar simulator includes the steps of: taking an image of a surface irradiated with a known light on a scattering reflection body at plural measurement points on the irradiated surface; obtaining a correction coefficient of other measurement point by comparing an image at other measurement point with respect to the image of reflected light of the scattering reflection body at an arbitrary measurement point, which is obtained on the image taken during the irradiation of the known light; taking an image of a surface irradiated with a light applied from a light source of the solar simulator on the scattering reflection body at the plural measurement points on the irradiated surface; and correcting, by using the correction coefficient with the image at other measurement point, the image of the reflected light of the scattering reflection body at the arbitrary measurement point obtained on the image taken during the irradiation of the light applied from the light source of the solar simulator. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010056381(A) 申请公布日期 2010.03.11
申请号 JP20080221253 申请日期 2008.08.29
申请人 NPC INC;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY 发明人 NAKANISHI YUJI;HASHIMOTO TORU;TOGAWA YOSHIMASA;NAKADA MASARU;HISHIKAWA YOSHIHIRO
分类号 H01L31/04 主分类号 H01L31/04
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