| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a hard disk inspecting device achieving the stabilization and uniformization of the quantity of the illumination light to the inspection target region of a hard disk and suitable even for the adaptation to the simultaneous inspection of the surface (recording surface part) and edge face (edge part) of the hard disk or the simultaneous inspection of both surfaces. <P>SOLUTION: The surface of the disk (12) held to a vertical posture is irradiated with illumination light having an illumination pattern becoming an irradiation range, which has a shape almost the same to that of an inspection region containing an edge, from illumination devices (112, 114, 116 and 118) and the reflected light from the inspection region containing the edge is imaged by cameras (102 and 104). Light source devices (310 and 311) are respectively provided to the respective inspection surfaces on the front and back sides of the disk (12) one by one and an optical fiber (312 or 313) is branched from one light source device (310 or 311) to symmetrically illuminate the inspection region of the disk (12) from two directions (left and right). <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
