| 摘要 |
A micro-electro-mechanical systems (MEMS) accelerometer comprises a wafer micro-fabricated to provide a frame ( 10 ) defining an opening within which is disposed a sensing mass ( 14 ). A pair of aligned pivot beams ( 15 ) connect the mass to the frame ( 10 ) so that the axis of pivoting is displaced from the centre of gravity of the mass. At least one sensing beam ( 16 ) connects the mass ( 14 ) to the frame, the sensing beam ( 16 ) being distorted by pivoting movement of the mass ( 14 ). Distortion of the sensing beam on pivoting movement of the mass is determined, from which the acceleration of the accelerometer may be determined. |
