| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device and a method of manufacturing a circuit board attaining scan at the same distance pitch and almost the same energy quantity per scan as those in an isokinetic state even in accelerated and decelerated states by a simple control operation. <P>SOLUTION: The device includes a laser oscillator 1, a scanner 2 and a laser scan control unit 3. The scanner 2 performs scan with pulsed laser light by sequentially shifting the state to four states of the accelerated, isokinetic, decelerated and stopped states. The laser scan control unit 3 decides that the scanner 2 has been shifted from which state of the four states to the next state. When it decides that the scanner has been shifted to the accelerated or decelerated state, it generates pulse frequency information so as to attain almost the same distance pitch and energy quantity per scan as those for scan in the isokinetic state and transmits the information to the laser oscillator. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
