| 摘要 |
PROBLEM TO BE SOLVED: To assure high classification capability, while alleviating a burden on a user who teaches defects, by enabling the classification capability to be improved by teaching a small number of suitable defects, under the condition that a small number of DOIs (defect of interest) exist in a large majority of nuisances. SOLUTION: A defect inspecting method is provided, wherein the step (S105) of extracting one or more defects from a plurality of defects detected by photographing a sample, and then teaching a classification class of the defects, and the step (S106) of computing a classification criterion and a classification capability from the classification class and image information of the defects, are executed repeatedly, and a classification class of unknown defects is determined from the classification criterion ultimately obtained. Accordingly, the classification capability can be improved by teaching the small number of suitable defects, and by assuring the classification capability to be high, while alleviating the load on the user who teaches the defects. COPYRIGHT: (C)2010,JPO&INPIT
|
