WORKPIECE CONVEYING DEVICE AND WORKPIECE CONVEYING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a workpiece conveying device capable of automatically conveying even a workpiece having a long region to be held such as a large-size glass substrate and a bar member without breaking and damaging it in various manners and delivering the workpiece smoothly. SOLUTION: This workpiece conveying device is constituted by arranging a plurality of arm type hands 4 constituted to let holding members 16 move while maintaining the same attitude by rotating a second arm 13 in one direction and rotating the holding members 16 in the other direction in accordance with the rotation of a first arm 10 receiving rotation torque from a driving part 26 in the other direction in parallel and operating a plurality of arm type hands 4 in synchronization. Each holding member 16 of a plurality of arm type hands 4 is constituted to let the direction of travel parallel and let the travel speed the same to one another. COPYRIGHT: (C)2010,JPO&INPIT