| 摘要 |
<p>Inspection method for determining the location of defects on or in transparent plate material.
Included are the step of capturing an image (hereinafter called a first image) of a main surface of a transparent plate material (1) by using a first reflective bright-field optical system disposed at a main surface side of the transparent plate material (1), the first optical system including a linear light source (2) and a camera (3); the step of capturing an image (hereinafter called a second image) of a rear surface of the transparent plate material (1) in the same way; the step of searching for a defect candidate in each of the first and second images; and the steps of determining, based on the contrast of an image of a defect candidate obtained by the search, whether a real image or a virtual image was formed; and determining, based on an appearance pattern of the real image or the virtual image, whether the defect candidate is located on the main surface, inside, or on the rear surface of the transparent plate material.</p> |
