POLISHING SLURRIES AND METHODS FOR CHEMICAL MECHANICAL POLISHING,申请号KR20077015858-传众专利搜索

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发明名称	POLISHING SLURRIES AND METHODS FOR CHEMICAL MECHANICAL POLISHING
摘要
申请公布号	KR100946421(B1)	申请公布日期	2010.03.10
申请号	KR20077015858	申请日期	2006.01.10
申请人		发明人
分类号	H01L21/304;C09G1/02;C09K3/14;C23F3/06;H01L21/321	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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