| 摘要 |
PURPOSE: A manufacturing method of a nanostructure is provided to efficiently and conveniently manufacture the nanostructure of a desired shape and size with one patterning on several surfaces with one patterning process. CONSTITUTION: A manufacturing method of a nanostructure includes the following steps: forming a multilayer stack with at least a sacrificial layer and a structural layer on a substrate(100); patterning the multilayer stance to form the nanostructure; and releasing the nanostructure(200) form the multilayer stack. In a forming step of the multilayer stack, a deposition step is included to alternatively deposit the structural layer and the sacrificial layer on the substrate. A patterning step for the multilayer stack includes a step for transcribing patterns on the multilayer stack and a step for etching the structural layer and the sacrificial layer according to the transcribed pattern.
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