发明名称 STAMP FOR SUPERHYDROPHOBIC MICRO/NANO HYBRID SURFACE BASED ON ANODIC ALUMINUM OXIDE, METHOD OF MANUFACTURING THE SAME, AND PRODUCT MANUFACTURED WITH THE SAME
摘要 <p>PURPOSE: A stamp, a manufacturing method, and a product thereof are provided to implement a minute pattern using a simple process by using a solidified photoresist. CONSTITUTION: An anodic aluminum oxide template with a plurality of nano holes is formed(S1). A photoresist is spread on the anodic aluminum oxide template(S2). A plurality of photoresist holes are formed so that the top surface of the anodic aluminum oxide template is exposed by patterning the photoresist(S3). A metal is laminated on the surface of the anodic aluminum oxide template exposed by the hole of the photoresist(S4). A stamp consisting of the metal including aluminum oxide by removing a remaining photoresist is manufactured(S5). At least one between an interval between neighboring photoresist holes and a diameter is microscopic.</p>
申请公布号 KR20100026101(A) 申请公布日期 2010.03.10
申请号 KR20080084961 申请日期 2008.08.29
申请人 CHUNG-ANG UNIVERSITY INDUSTRY-ACADEMY COOPERATIONFOUNDATION 发明人 KIM, DONG SUNG
分类号 H01L21/027 主分类号 H01L21/027
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