发明名称 |
STAMP FOR SUPERHYDROPHOBIC MICRO/NANO HYBRID SURFACE BASED ON ANODIC ALUMINUM OXIDE, METHOD OF MANUFACTURING THE SAME, AND PRODUCT MANUFACTURED WITH THE SAME |
摘要 |
<p>PURPOSE: A stamp, a manufacturing method, and a product thereof are provided to implement a minute pattern using a simple process by using a solidified photoresist. CONSTITUTION: An anodic aluminum oxide template with a plurality of nano holes is formed(S1). A photoresist is spread on the anodic aluminum oxide template(S2). A plurality of photoresist holes are formed so that the top surface of the anodic aluminum oxide template is exposed by patterning the photoresist(S3). A metal is laminated on the surface of the anodic aluminum oxide template exposed by the hole of the photoresist(S4). A stamp consisting of the metal including aluminum oxide by removing a remaining photoresist is manufactured(S5). At least one between an interval between neighboring photoresist holes and a diameter is microscopic.</p> |
申请公布号 |
KR20100026101(A) |
申请公布日期 |
2010.03.10 |
申请号 |
KR20080084961 |
申请日期 |
2008.08.29 |
申请人 |
CHUNG-ANG UNIVERSITY INDUSTRY-ACADEMY COOPERATIONFOUNDATION |
发明人 |
KIM, DONG SUNG |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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