METHOD FOR FABRICATING CAPACITOR

摘要

PURPOSE: A method for manufacturing a capacitor is provided to prevent the bridge of a capacitor by forming a bottom electrode without a cusped part. CONSTITUTION: A sacrificial layer(15) for providing a storage node hole is formed on a substrate(11). A conductive layer is formed along the step of an overall structure including a storage node hole. A protective layer(19A) for filling the storage node hole is formed on the conductive layer inside the storage node hole. The conductive layer is separated using the wet etching. The protective layer and the sacrificial layer are removed with a dip-out.