APPARATUS FOR SUPPLYING SEMICONDUCTOR TEST MATERIALS

摘要

PURPOSE: A semiconductor test material supplying apparatus is provided to return materials to be tested to a home position by sensing the slip of the materials in a high speed semiconductor inspection device using a conveyer system. CONSTITUTION: A semiconductor test material supplying apparatus comprises a drive roller(10), a conveyer belt(30), a rotary roller(20), a hole count sensor(100), and a controller. Rotating with the fixed amount of rotation, the drive roller periodically outputs encoder pulse signals. The conveyer belt adheres closely to the outer circumference of the drive roller and is driven by frictional force. The rotary roller rotates according to the drive force of the drive roller delivered through the conveyer belt. The hole count sensor senses the number of holes arranged in a row on material to be tested and outputs hole sensing signals.