发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce a trimming process cost of a semiconductor chip and to shorten the lead time of manufacturing. <P>SOLUTION: An electrode part and a wiring part on a surface of the semiconductor chip until trimming is photographed, in a duration from a die-bond curing process to a wire bond process of a package assembling process. Then, the electrical properties are measured, and the wiring to be trimmed is decided by referring to production information, and the wiring part at an opening part of a protective film is irradiated by a laser for laser trimming. Accordingly, there is no need to trim the entire wafer, and the cost is reduced. Furthermore, the lead time for product shipment becomes shortened. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010050373(A) 申请公布日期 2010.03.04
申请号 JP20080215124 申请日期 2008.08.25
申请人 SEIKO INSTRUMENTS INC 发明人 KOBAYASHI GORO
分类号 H01L21/822;H01L21/82;H01L27/04 主分类号 H01L21/822
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